- 专利标题: Plasma processing apparatus and plasma processing method
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申请号: US17450886申请日: 2021-10-14
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公开(公告)号: US11817321B2公开(公告)日: 2023-11-14
- 发明人: Yuzuru Sakai , Ryo Terashima
- 申请人: Tokyo Electron Limited
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: IPUSA, PLLC
- 优先权: JP 20176954 2020.10.21
- 主分类号: H01L21/311
- IPC分类号: H01L21/311 ; H01J37/32 ; H01L21/67 ; H01L21/687
摘要:
A plasma processing apparatus includes a plurality of plasma processing chambers, a process gas supply line that supplies a plasma processing gas to the plasma processing chambers, a first additive gas supply line that supplies an additive gas to the plasma processing chambers, an exhaust space shared by the plurality of plasma processing chambers, and a controller. The controller determines a first plasma processing chamber group and a second plasma processing chamber group. The first plasma processing chamber group includes one or more plasma processing chambers, each of which performs the plasma processing and the second plasma processing chamber group includes one or more plasma processing chambers, each of which does not perform the plasma processing. The controller causes the additive gas to be supplied to the one or more plasma processing chambers of the second plasma processing chamber group from the first additive gas supply line.
公开/授权文献
- US20220122847A1 PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD 公开/授权日:2022-04-21
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