- 专利标题: RF voltage and current (V-I) sensors and measurement methods
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申请号: US16913545申请日: 2020-06-26
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公开(公告)号: US11817296B2公开(公告)日: 2023-11-14
- 发明人: Barton Lane , Merritt Funk , Yohei Yamazawa , Justin Moses , Chelsea DuBose , Michael Hummel
- 申请人: Tokyo Electron Limited
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Slater Matsil, LLP
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; G01R29/08
摘要:
A radio frequency sensor assembly includes a sensor casing disposed around a central hole, the sensor casing including a first conductive cover and a second conductive cover. The assembly includes a cavity disposed around the central hole and includes a dielectric material, the cavity being bounded by a first major outer surface and a second major outer surface along a radial direction from a center of the central hole, where the first conductive cover is electrically coupled to the second conductive cover through a coupling region beyond the second major outer surface of the cavity, and electrically insulated from the second conductive cover by the cavity and the central hole. The assembly includes a current sensor electrically insulated from the sensor casing and including a current pickup disposed symmetrically around the central hole, the current pickup being disposed within the cavity and being insulated from the sensor casing.
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