- 专利标题: Device for the chromatic confocal measurement of a local height and/or orientation of a surface of a sample and corresponding methods for measuring a height or a roughness of a sample
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申请号: US17281780申请日: 2019-10-02
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公开(公告)号: US11815346B2公开(公告)日: 2023-11-14
- 发明人: Jérôme Gaillard-Groleas , Sébastien Gerand , Gabrielle Moussu
- 申请人: SCIENCES ET TECHNIQUES INDUSTRIELLES DE LA LUMIERE
- 申请人地址: FR Aix-en-Provence
- 专利权人: SCIENCES ET TECHNIQUES INDUSTRIELLES DE LA LUMIERE
- 当前专利权人: SCIENCES ET TECHNIQUES INDUSTRIELLES DE LA LUMIERE
- 当前专利权人地址: FR Aix-en-Provence
- 代理机构: Lerner David LLP
- 优先权: FR 59112 2018.10.02
- 国际申请: PCT/EP2019/076762 2019.10.02
- 国际公布: WO2020/070220A 2020.04.09
- 进入国家日期: 2021-03-31
- 主分类号: G01B11/06
- IPC分类号: G01B11/06 ; G01B11/30
摘要:
The invention concerns a device (1) for the chromatic confocal measurement of a local height and/or orientation of a surface (S) of a sample comprising—a light source (2) configured to generate a polychromatic light beam (9)—a projection lens (4) comprising a lens (4) with axial chromatism configured to apply the light beam (9) to the surface (S) of the sample, —an optical sensor, configured to receive a light beam (9) reflected by the surface (S) of the sample and measure a total energy of the reflected light beam (9) received during an integration interval, —a scanning system (10), coupled to the projection lens (4) and configured to move the propagation axis of the light beam (9) relative to the projection lens (4), such that the total energy measured by the optical sensor corresponds to a dynamic spatial average of the total energy of the light beam (9) reflected by the surface (S) of the sample.
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