Invention Grant
- Patent Title: Semiconductor element bonding structure, method for producing semiconductor element bonding structure, and electrically conductive bonding agent
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Application No.: US17187452Application Date: 2021-02-26
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Publication No.: US11810885B2Publication Date: 2023-11-07
- Inventor: Kohei Tatsumi , Yasunori Tanaka
- Applicant: WASEDA UNIVERSITY
- Applicant Address: JP Tokyo
- Assignee: WASEDA UNIVERSITY
- Current Assignee: WASEDA UNIVERSITY
- Current Assignee Address: JP Tokyo
- Agency: Best Mode IP Law, PLLC
- Agent Yusuke Hirai
- Priority: JP 18163838 2018.08.31
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/495

Abstract:
A semiconductor element bonding structure capable of strongly bonding a semiconductor element and an object to be bonded and relaxing thermal stress caused by a difference in thermal expansion, by interposing metal particles and Ni between the semiconductor element and the object to be bonded, the metal particles having a lower hardness than Ni and having a micro-sized particle diameter. A plurality of metal particles 5 (aluminum (Al), for example) having a lower hardness than nickel (Ni) and having a micro-sized particle diameter are interposed between a semiconductor chip 3 and a substrate 2 to be bonded to the semiconductor chip 3, and the metal particles 5 are fixedly bonded by the nickel (Ni). Optionally, aluminum (Al) or an aluminum alloy (Al alloy) is used as the metal particles 5, and aluminum (Al) or an aluminum alloy (Al alloy) is used on the surface of the semiconductor chip 3 and/or the surface of the substrate 2.
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