发明授权
- 专利标题: Memory device
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申请号: US17324411申请日: 2021-05-19
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公开(公告)号: US11805655B2公开(公告)日: 2023-10-31
- 发明人: Donghoon Kwon , Junsuk Kim , Jongheun Lim
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Lee IP Law, P.C.
- 优先权: KR 20200126569 2020.09.29
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H10B43/50 ; H01L23/535 ; H01L21/768 ; H10B41/27 ; H10B41/41 ; H10B41/50 ; H10B43/27 ; H10B43/40
摘要:
A memory device includes a cell stacked structure on a substrate, the cell stacked structure including insulation layers and gate patterns alternately stacked, a channel structure passing through the cell stacked structure, the channel structure extending in a vertical direction, a dummy structure on the substrate, the dummy structure being spaced apart from the cell stacked structure, and the dummy structure including insulation layers and metal patterns alternately stacked, a first through via contact passing through the dummy structure, the first through via contact extending in the vertical direction, and a first capping insulation pattern between a sidewall of the first through via contact and each of the metal patterns in the dummy structure, the first capping insulation pattern insulating the first through via contact from each of the metal patterns.
公开/授权文献
- US20220102370A1 MEMORY DEVICE 公开/授权日:2022-03-31
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