Invention Grant
- Patent Title: Method for fabricating field-effect transistor
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Application No.: US17705376Application Date: 2022-03-27
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Publication No.: US11804550B2Publication Date: 2023-10-31
- Inventor: Su Xing , Chung Yi Chiu , Hai Biao Yao
- Applicant: United Microelectronics Corp.
- Applicant Address: TW Hsinchu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Priority: CN 2010391505.0 2020.05.11
- The original application number of the division: US16907001 2020.06.19
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/8232 ; H01L21/225 ; H01L21/762 ; H01L29/749 ; H01L29/786 ; H01L29/66

Abstract:
A method for fabricating a field-effect transistor includes the following steps. A gate structure layer in a line shape including a first region and a second region abutting to the first region is formed on a silicon layer. A first implanting process is performed to implant first-type dopants at least into a second portion of the second region of the gate structure layer. A second implanting region is performed to implant second-type dopants into the silicon layer to form a source region and a second region corresponding to the first region of the gate structure layer. The gate structure layer has a conductive-type junction at an interface between the first and second portions of the second region. A width of the silicon layer under the second region of the gate structure layer is smaller than a width of the gate structure layer.
Public/Granted literature
- US20220216344A1 METHOD FOR FABRICATING FIELD-EFFECT TRANSISTOR Public/Granted day:2022-07-07
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