- 专利标题: Two dimensional rod resonator for RF filtering
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申请号: US17097289申请日: 2020-11-13
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公开(公告)号: US11784623B2公开(公告)日: 2023-10-10
- 发明人: Cristian Cassella , Xuanyi Zhao
- 申请人: Northeastern University
- 申请人地址: US MA Boston
- 专利权人: Northeastern University
- 当前专利权人: Northeastern University
- 当前专利权人地址: US MA Boston
- 代理机构: Verrill Dana, LLP
- 主分类号: H03H9/02
- IPC分类号: H03H9/02 ; H03H3/04 ; H03H9/17 ; H03H9/56 ; H03H9/13
摘要:
A microelectromechanical resonator device is provided having two-dimensional resonant rods. The resonator device has a piezoelectric layer formed with a plurality of alternating rods and trenches. A bottom electrode is in contact with a bottom surface of the piezoelectric layer. A top electrode metal grating of conductive strips is aligned in contact with corresponding rods of the piezoelectric layer.
公开/授权文献
- US20210152146A1 Two Dimensional Rod Resonator for RF Filtering 公开/授权日:2021-05-20
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