Invention Grant
- Patent Title: Semiconductor device and method of fabricating the same
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Application No.: US17070540Application Date: 2020-10-14
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Publication No.: US11682648B2Publication Date: 2023-06-20
- Inventor: Changbo Lee , Kwanhoo Son , Joon Seok Oh
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR 20200012762 2020.02.03
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/522 ; H01L21/768 ; H01L23/31 ; H01L21/56 ; H01L21/683 ; H01L23/528

Abstract:
Disclosed are semiconductor devices and methods of fabricating the same. The method comprises providing a carrier substrate that includes a conductive layer, placing a semiconductor die on the carrier substrate, forming an insulating layer to cover the semiconductor die on the carrier substrate, forming a via hole to penetrate the insulating layer at a side of the semiconductor die and to expose the conductive layer of the carrier substrate, performing a plating process in which the conductive layer of the carrier substrate is used as a seed to form a via filling the via hole, forming a first redistribution layer on a first surface of the semiconductor die and the insulating layer, removing the carrier substrate, and forming a second redistribution layer on a second surface of the semiconductor die and the insulating layer, the first surface and the second surface being located opposite each other.
Public/Granted literature
- US20210242158A1 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2021-08-05
Information query
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