- 专利标题: Thin film comprising titanium oxide, and method of producing thin film comprising titanium oxide
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申请号: US17181093申请日: 2021-02-22
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公开(公告)号: US11651790B2公开(公告)日: 2023-05-16
- 发明人: Hideo Takami , Masataka Yahagi
- 申请人: JX Nippon Mining & Metals Corporation
- 申请人地址: JP Tokyo
- 专利权人: JX NIPPON MINING & METALS CORPORATION
- 当前专利权人: JX NIPPON MINING & METALS CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Howson & Howson LLP
- 优先权: JP 07326485 2007.12.18 JP 08239951 2008.09.18
- 分案原申请号: US12808469
- 主分类号: H01J37/34
- IPC分类号: H01J37/34 ; G11B7/2548 ; C04B35/46 ; C23C14/08 ; G11B7/26 ; C23C14/34 ; C04B35/645 ; G11B7/2578 ; G11B7/254
摘要:
A thin film is provided that primarily comprises titanium oxide and includes Ti, Ag and O. The thin film contains 29.6 at % or more and 34.0 at % or less of Ti, 0.003 at % or more and 7.4 at % or less of Ag, and oxygen as the remainder thereof and has a ratio of oxygen to metals, O/(2Ti+0.5Ag), of 0.97 or more. The thin film has a high refractive index and a low extinction coefficient. In addition, the thin film has superior transmittance, minimally deteriorates in reflectance, and is useful as an interference film or a protective film for an optical information recording medium. The film may also be applied to a glass substrate to provide a heat reflective film, an antireflective film, or an interference filter. A method of producing the thin film is also disclosed.
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