- 专利标题： Sol gel coated support ring
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申请号： US16857504申请日： 2020-04-24
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公开(公告)号： US11646218B2公开(公告)日： 2023-05-09
- 发明人: Joseph M. Ranish
- 申请人： Applied Materials, Inc.
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson + Sheridan, LLP
- 分案原申请号： US15935469 2018.03.26
- 主分类号： H01L21/687
- IPC分类号： H01L21/687 ; H01L21/67 ; C23C18/12
摘要：
A support member for a thermal processing chamber is described. The support member has a sol coating on at least one surface. The sol coating contains a material that blocks a desired wavelength or spectrum of radiation from being transmitted by the material of the support member. The sol coating may be a multi-layer structure that may include adhesion layers, transition layers, and cap layers, in addition to radiation-blocking layers.
公开/授权文献
- US20200251375A1 SOL GEL COATED SUPPORT RING 公开/授权日：2020-08-06
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