发明授权
- 专利标题: Stackable symmetrical operation memory bit cell structure with bidirectional selectors
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申请号: US17135041申请日: 2020-12-28
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公开(公告)号: US11621297B2公开(公告)日: 2023-04-04
- 发明人: Alexander Reznicek , Bahman Hekmatshoartabari , Oleg Gluschenkov , Yasir Sulehria
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Tutunjian & Bitetto, P.C.
- 代理商 L. Jeffrey Kelly
- 主分类号: H01L27/24
- IPC分类号: H01L27/24 ; H01L27/22 ; H01L45/00 ; H01L25/065 ; H01L43/08 ; H01L43/10 ; H01L43/12 ; G11C5/06
摘要:
A method of forming an electrical device that includes forming an amorphous semiconductor material on a metal surface of a memory device, in which the memory device is vertically stacked atop a first transistor. The amorphous semiconductor material is annealed with a laser anneal having a nanosecond duration to convert the amorphous semiconductor material into a crystalline semiconductor material. A second transistor is formed from the semiconductor material. The second transistor vertically stacked on the memory device.
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