- 专利标题: Wind speed sensor based on a flexible inductor and a silicon-based inductor
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申请号: US17054133申请日: 2019-09-26
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公开(公告)号: US11585825B2公开(公告)日: 2023-02-21
- 发明人: Zhenxiang Yi , Yu Wang , Wenjun Deng , Lifeng Wang , Ming Qin , Qingan Huang
- 申请人: SOUTHEAST UNIVERSITY
- 申请人地址: CN Nanjing
- 专利权人: SOUTHEAST UNIVERSITY
- 当前专利权人: SOUTHEAST UNIVERSITY
- 当前专利权人地址: CN Nanjing
- 代理机构: CBM Patent Consulting, LLC
- 优先权: CN201811423034.6 20181127
- 国际申请: PCT/CN2019/108032 WO 20190926
- 国际公布: WO2020/108064 WO 20200604
- 主分类号: G01P5/08
- IPC分类号: G01P5/08
摘要:
Disclosed is a wind speed sensor based on a flexible inductor and a silicon-based inductor, which relates to a MEMS device and belongs to the field of measurement and testing technologies. The wind speed sensor is a double-layer inductor structure composed of a flexible inductor and a silicon-based inductor. A metal layer of the flexible inductor and a metal layer of the silicon-based inductor face to each other and form, between them, an air cavity sufficient for mutual induction of electromotance. A contact block constituting a measuring port is deposited in the metal layer of the silicon-based inductor. The present invention has a light structure, and implements wind speed detection based on the Bernoulli effect and the coil mutual inductance effect.
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