- 专利标题: Memory device structure and method for forming the same
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申请号: US16934341申请日: 2020-07-21
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公开(公告)号: US11545619B2公开(公告)日: 2023-01-03
- 发明人: Hsing-Hsiang Wang , Han-Ting Lin , Yu-Feng Yin , Sin-Yi Yang , Chen-Jung Wang , Yin-Hao Wu , Kun-Yi Li , Meng-Chieh Wen , Lin-Ting Lin , Jiann-Horng Lin , An-Shen Chang , Huan-Just Lin
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 主分类号: H01L43/08
- IPC分类号: H01L43/08 ; H01L27/22 ; H01L43/10 ; H01L43/12 ; H01L43/02
摘要:
A method for forming a memory device structure is provided. The method includes providing a substrate, a first dielectric layer, a conductive via, a magnetic tunnel junction cell, a first etch stop layer, and a first spacer layer. The substrate has a first region and a second region, the first dielectric layer is over the substrate, the conductive via passes through the first dielectric layer over the first region. The method includes removing the first etch stop layer, which is not covered by the first spacer layer. The method includes removing the first dielectric layer, which is not covered by the first etch stop layer.
公开/授权文献
- US20220029091A1 MEMORY DEVICE STRUCTURE AND METHOD FOR FORMING THE SAME 公开/授权日:2022-01-27
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