- 专利标题: Adaptive control for a power generator
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申请号: US17232950申请日: 2021-04-16
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公开(公告)号: US11531312B2公开(公告)日: 2022-12-20
- 发明人: David J. Coumou , Yuriy Elner , Aung Toe , Daniel M. Gill , Eldridge M. Mount, IV , Shaun Smith
- 申请人: MKS Instruments, Inc.
- 申请人地址: US MA Andover
- 专利权人: MKS Instruments, Inc.
- 当前专利权人: MKS Instruments, Inc.
- 当前专利权人地址: US MA Andover
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 主分类号: G05B19/042
- IPC分类号: G05B19/042 ; H01L21/67 ; H01J37/32
摘要:
A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.
公开/授权文献
- US20210311448A1 Adaptive Control For A Power Generator 公开/授权日:2021-10-07
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