- Patent Title: Semiconductor device with channel patterns having different widths
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Application No.: US16730172Application Date: 2019-12-30
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Publication No.: US11522071B2Publication Date: 2022-12-06
- Inventor: Taehyung Kim , Kwanyoung Chun , Yoonjin Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2019-0068761 20190611
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/06 ; H01L29/78 ; H01L29/08 ; H01L29/423 ; H01L29/786 ; H01L21/768 ; H01L21/8234 ; H01L21/02

Abstract:
Disclosed is a semiconductor device comprising an active region that protrudes upwardly from a substrate, a plurality of channel patterns that are spaced apart from each other in a first direction on the active region, and a gate electrode that extends in the first direction on the active region and covers the plurality of channel patterns. Each of the plurality of channel patterns includes a plurality of semiconductor patterns that are spaced apart from each other in a direction perpendicular to a top surface of the active region. The gate electrode covers the top surface of the active region between the plurality of channel patterns.
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