- 专利标题: Lamp device, exposure apparatus, and method of manufacturing article
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申请号: US17018092申请日: 2020-09-11
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公开(公告)号: US11521845B2公开(公告)日: 2022-12-06
- 发明人: Hideki Matsumoto , Yasushi Sugiyama , Kohei Suzuki , Yukihiro Yokota , Shunsuke Ota
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 代理机构: Carter, DeLuca & Farrell LLP
- 优先权: JPJP2019-168732 20190917
- 主分类号: H01J61/28
- IPC分类号: H01J61/28 ; H01J61/32 ; G03F7/20 ; H01J61/36 ; H01J61/30 ; H01J61/20
摘要:
The present invention provides a lamp device comprising: a glass tube configured to cover a discharge space in which a pair of electrodes are arranged so as to face each other; and a bayonet cap portion provided in an end portion of the glass tube and electrically connected to one electrode of the pair of electrodes, wherein the bayonet cap portion is formed to have a shape including a bottom surface and a peripheral surface, and includes, in the bottom surface, a first opening configured to supply a gas to an inside of the bayonet cap portion and a second opening configured to exhaust the gas from the inside of the bayonet cap portion.
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