- 专利标题: Semiconductor devices
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申请号: US17123646申请日: 2020-12-16
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公开(公告)号: US11508923B2公开(公告)日: 2022-11-22
- 发明人: Jan Jongman , Brian Asplin
- 申请人: Flexenable Limited
- 申请人地址: GB Cambridge
- 专利权人: Flexenable Limited
- 当前专利权人: Flexenable Limited
- 当前专利权人地址: GB Cambridge
- 代理机构: Dergosits & Noah LLP
- 代理商 Todd A. Noah
- 优先权: GB1918631 20191217
- 主分类号: H01L51/10
- IPC分类号: H01L51/10 ; H01L27/28 ; H01L51/05 ; H01L27/12 ; H01L29/786 ; H01L51/00 ; H01L21/027 ; H01L27/32
摘要:
A technique, comprising: forming in situ on a support substrate: a first metal layer; a light-absorbing layer after the first metal layer; a conductor pattern after the light-absorbing layer; and a semiconductor layer after the conductor pattern; patterning the semiconductor layer using a resist mask to form a semiconductor pattern defining one or more semiconductor channels of one or more semiconductor devices; and patterning the light-absorbing layer using the resist mask and the conductor pattern, so as to selectively retain the light-absorbing layer in regions that are occupied by at least one of the resist mask and the conductor pattern.
公开/授权文献
- US20210184144A1 SEMICONDUCTOR DEVICES 公开/授权日:2021-06-17
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