- 专利标题: Substrate container system
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申请号: US16872392申请日: 2020-05-12
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公开(公告)号: US11508594B2公开(公告)日: 2022-11-22
- 发明人: Ming-Chien Chiu , Chih-Ming Lin , Cheng-En Chung , Nien-Yun Yu , Po-Ting Lee
- 申请人: GUDENG PRECISION INDUSTRIAL CO., LTD
- 申请人地址: TW New Taipei
- 专利权人: GUDENG PRECISION INDUSTRIAL CO., LTD
- 当前专利权人: GUDENG PRECISION INDUSTRIAL CO., LTD
- 当前专利权人地址: TW New Taipei
- 代理机构: ScienBiziP, P.C.
- 优先权: TW108124813 20190713
- 主分类号: H01L21/673
- IPC分类号: H01L21/673 ; H01L21/677 ; H01L21/67
摘要:
A substrate container system comprises a container body having a bottom face, a front opening that enables passage of a substrate, and a back opening opposing the front opening, the back opening having a width smaller than that of the front opening; and a back cover that covers the back opening and establishes sealing engagement with the container body, wherein the back cover comprises a first gas inlet structure that bendingly extends under the bottom face of the container body upon assembly; wherein the first gas inlet structure comprises a downward facing gas intake port opposing the bottom face of the container body.
公开/授权文献
- US20210013076A1 SUBSTRATE CONTAINER SYSTEM 公开/授权日:2021-01-14
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