- 专利标题: Resistive random-access memory (RRAM) device and forming method thereof
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申请号: US17211875申请日: 2021-03-25
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公开(公告)号: US11489114B2公开(公告)日: 2022-11-01
- 发明人: Shu-Hung Yu , Chun-Hung Cheng , Chuan-Fu Wang
- 申请人: UNITED MICROELECTRONICS CORP.
- 申请人地址: TW Hsin-Chu
- 专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人地址: TW Hsin-Chu
- 代理商 Winston Hsu
- 优先权: CN202110212202.2 20210225
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
A resistive random-access memory (RRAM) device includes a bottom electrode, a high work function layer, a resistive material layer, a top electrode and high work function spacers. The bottom electrode, the high work function layer, the resistive material layer and the top electrode are sequentially stacked on a substrate, wherein the resistive material layer includes a bottom part and a top part. The high work function spacers cover sidewalls of the bottom part, thereby constituting a RRAM cell. The present invention also provides a method of forming a RRAM device.
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