- 专利标题: Memory cell and fabricating method of the same
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申请号: US17219829申请日: 2021-03-31
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公开(公告)号: US11417742B1公开(公告)日: 2022-08-16
- 发明人: Chih-Hao Pan , Chi-Cheng Huang , Kuo-Lung Li , Szu-Ping Wang , Po-Hsuan Chen , Chao-Sheng Cheng
- 申请人: UNITED MICROELECTRONICS CORP.
- 申请人地址: TW Hsin-Chu
- 专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人地址: TW Hsin-Chu
- 代理商 Winston Hsu
- 优先权: CN202110207969.6 20210224
- 主分类号: H01L29/423
- IPC分类号: H01L29/423 ; H01L29/66 ; H01L21/28 ; H01L29/792
摘要:
A memory cell includes a substrate. A first STI and a second STI are embedded within the substrate. The first STI and the second STI extend along a first direction. An active region is disposed on the substrate and between the first STI and the second STI. A control gate is disposed on the substrate and extends along a second direction. The first direction is different from the second direction. A tunneling region is disposed in the active region overlapping the active region. A first trench is embedded within the tunneling region. Two second trenches are respectively embedded within the first STI and the second STI. The control gate fills in the first trench and the second trenches. An electron trapping stack is disposed between the tunneling region and the control gate.
公开/授权文献
- US20220271137A1 MEMORY CELL AND FABRICATING METHOD OF THE SAME 公开/授权日:2022-08-25
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