- 专利标题: Semiconductor detector and method of manufacturing the same
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申请号: US17206566申请日: 2021-03-19
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公开(公告)号: US11417702B2公开(公告)日: 2022-08-16
- 发明人: Kazuyuki Hozawa , Taiichi Takezaki
- 申请人: Hitachi, Ltd.
- 申请人地址: JP Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Miles & Stockbridge, P.C.
- 优先权: JPJP2020-093018 20200528
- 主分类号: G01T1/24
- IPC分类号: G01T1/24 ; H01L27/146
摘要:
A technique capable of improving a performance of a semiconductor detector is provided. The semiconductor detector is made based on injection of an underfill into a gap between a first semiconductor chip and a second semiconductor chip in a flip-chip connection state, but the underfill is not formed in periphery of a connection structure connecting a reading electrode pad and a gate terminal through a bump electrode.
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