发明授权
- 专利标题: Semiconductor device with EMI protection structure and method for fabricating the same
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申请号: US16850459申请日: 2020-04-16
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公开(公告)号: US11417608B2公开(公告)日: 2022-08-16
- 发明人: Chin-Te Kuo
- 申请人: NANYA TECHNOLOGY CORPORATION
- 申请人地址: TW New Taipei
- 专利权人: NANYA TECHNOLOGY CORPORATION
- 当前专利权人: NANYA TECHNOLOGY CORPORATION
- 当前专利权人地址: TW New Taipei
- 代理机构: Muncy, Geissler, Olds & Lowe, P.C.
- 主分类号: H01L23/552
- IPC分类号: H01L23/552 ; H01L23/528 ; H01L23/00 ; H01L21/768 ; H01L23/522
摘要:
The present application discloses a semiconductor device with an electromagnetic interference protection structure and a method for fabricating the semiconductor device. The semiconductor device includes a connection structure having a connection dielectric layer, a first conductive plate positioned in the connection dielectric layer and electrically coupled to a supply voltage, a first bottom protection layer positioned below the first conductive plate, and a first top protection layer positioned on the first conductive plate, and a connection conductive layer positioned in the connection dielectric layer. The first bottom protection layer and the first top protection layer are formed of manganese-zinc ferrite, nickel-zinc ferrite, cobalt ferrite, strontium ferrite, barium ferrite, lithium ferrite, lithium-zinc ferrite, single crystal yttrium iron garnet, or gallium substituted single crystal yttrium iron garnet.
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