- 专利标题: Package structure and method of manufacturing the same
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申请号: US17006876申请日: 2020-08-30
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公开(公告)号: US11417582B2公开(公告)日: 2022-08-16
- 发明人: Wei-Chih Chen , Hung-Jui Kuo , Yu-Hsiang Hu , Sih-Hao Liao , Hung-Chun Cho
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: JCIPRNET
- 主分类号: H01L29/94
- IPC分类号: H01L29/94 ; H01L23/31 ; H01L23/00 ; H01L23/498
摘要:
A package structure includes a semiconductor die, an insulating encapsulation, a first redistribution circuit structure and a surface-modifying film. The semiconductor die has conductive terminals. The insulating encapsulation laterally encapsulates the semiconductor die and exposes the conductive terminals. The first redistribution circuit structure is located over the insulating encapsulation and electrically connected to the semiconductor die. The surface-modifying film is located on the insulating encapsulation and has a plurality of openings exposing edges of the conductive terminals, wherein the surface-modifying film separates the first redistribution circuit structure from the insulating encapsulation.
公开/授权文献
- US20220068746A1 PACKAGE STRUCTURE AND METHOD OF MANUFACTURING THE SAME 公开/授权日:2022-03-03
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