- 专利标题: Method of manufacturing semiconductor package
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申请号: US17111758申请日: 2020-12-04
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公开(公告)号: US11417559B2公开(公告)日: 2022-08-16
- 发明人: Yeonga Kim , Seonho Lee
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Myers Bigel, P.A.
- 优先权: KR10-2020-0053389 20200504
- 主分类号: H01L21/683
- IPC分类号: H01L21/683 ; H01L21/56 ; H01L23/31
摘要:
To manufacture a semiconductor package, a package intermediate structure having an element area and a dummy area is formed. A carrier substrate including an adhesion layer is formed. The adhesion layer includes a first area with a first adhesion strength and a second area with a second adhesion strength that is different from the first adhesion strength. The package intermediate structure is supported by the carrier substrate so that the element area is adjacent the first area and the dummy area is adjacent the second area. The package intermediate structure is processed while the package intermediate structure is supported by the carrier substrate.
公开/授权文献
- US20210343569A1 METHOD OF MANUFACTURING SEMICONDUCTOR PACKAGE 公开/授权日:2021-11-04
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