- 专利标题: Contactless workpiece temperature sensor
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申请号: US16430649申请日: 2019-06-04
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公开(公告)号: US11415463B2公开(公告)日: 2022-08-16
- 发明人: Paul E. Pergande
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Nields, Lemack & Frame, LLC
- 主分类号: G01J5/00
- IPC分类号: G01J5/00 ; G01K7/02 ; H01L21/67 ; G01J5/10
摘要:
A contactless temperature sensor for measuring the temperature of a workpiece is disclosed. The contactless temperature sensor uses a cushion of gas to separate the bottom surface of the workpiece from the top surface of the temperature sensor. The contactless temperature sensor includes a puck having a conduit therethrough. The conduit has a first portion having a first diameter, and a second portion having a second, narrower diameter. A gas tube rests in the first portion of the conduit, disposed proximate the bottom surface of the puck. Since the puck is not affixed to the gas tube, angular compliance may be achieved between the workpiece and the puck. Gas passes through the second portion and to the top surface of the puck. This gas provides a cushion between the top surface of the puck and the underside of the workpiece and conducts heat from the workpiece to the puck.
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