- 专利标题: Plasma generator and information processing method
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申请号: US16963877申请日: 2018-01-23
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公开(公告)号: US11412606B2公开(公告)日: 2022-08-09
- 发明人: Shinji Takikawa
- 申请人: FUJI CORPORATION
- 申请人地址: JP Chiryu
- 专利权人: FUJI CORPORATION
- 当前专利权人: FUJI CORPORATION
- 当前专利权人地址: JP Chiryu
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 国际申请: PCT/JP2018/001872 WO 20180123
- 国际公布: WO2019/145990 WO 20190801
- 主分类号: H05H1/46
- IPC分类号: H05H1/46 ; H01J37/244 ; H01J37/32
摘要:
It is an object of the present invention to provide a plasma generator capable of efficiently identifying the cause of an abnormal stoppage when an abnormal stoppage of the plasma generator occurs. When the controller determines that at least one detected value has become an abnormal value, the controller terminates plasma generation control. Further, in response to starting plasma generation control, the controller causes the storage section to store a history of detected values in association with time. As a result, it is possible to provide a history of detected values stored in the storage section to efficiently identify the cause of the abnormal stoppage.
公开/授权文献
- US20210051791A1 PLASMA GENERATOR AND INFORMATION PROCESSING METHOD 公开/授权日:2021-02-18
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