- 专利标题: Fan-out wafer-level packaging structure and method packaging the same
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申请号: US17207368申请日: 2021-03-19
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公开(公告)号: US11380649B2公开(公告)日: 2022-07-05
- 发明人: Hailin Zhao
- 申请人: SJ SEMICONDUCTOR (JIANGYIN) CORPORATION
- 申请人地址: CN JiangYin
- 专利权人: SJ SEMICONDUCTOR (JIANGYIN) CORPORATION
- 当前专利权人: SJ SEMICONDUCTOR (JIANGYIN) CORPORATION
- 当前专利权人地址: CN JiangYin
- 代理机构: Alston & Bird LLP
- 优先权: CN202010936915.9 20200908,CN202021943526.0 20200908
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L21/56
摘要:
The present disclosure provides a fan-out wafer-level packaging structure and a method for packaging the same. The structure includes: two or more semiconductor chips with a bonding pad, the semiconductor chips are arranged in a fan-out wafer array, and each of the semiconductor chips has an initial position, respectively; a plastic packaging layer, covering surfaces of the semiconductor chips and between the semiconductor chips, each of the semiconductor chips has an offset position, respectively, and the offset position has an offset distance relative to the initial position; a redistribution layer formed on the semiconductor chips, to realize interconnection between the semiconductor chips, the redistribution layer includes at least one first redistribution layer, the first redistribution layer is formed on a surface of the semiconductor chips and is aligned and in contact with the bonding pad of the semiconductor chips; and a metal bump formed on the redistribution layer.
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