Invention Grant
- Patent Title: Semiconductor devices
-
Application No.: US16418705Application Date: 2019-05-21
-
Publication No.: US11296204B2Publication Date: 2022-04-05
- Inventor: Seungseok Ha , Gukil An , Keun Hwi Cho , Sungmin Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR10-2018-0078290 20180705,KR10-2019-0000811 20190103
- Main IPC: H01L29/51
- IPC: H01L29/51 ; H01L29/49 ; H01L29/786 ; H01L29/423

Abstract:
Semiconductor devices and methods of forming the same are provided. The semiconductor devices may include a substrate, a pair of semiconductor patterns adjacent to each other on the substrate, a gate electrode on the pair of semiconductor patterns, a source/drain pattern connected to the pair of semiconductor patterns, and a ferroelectric pattern on surfaces of the pair of semiconductor patterns. The surfaces of the pair of semiconductor patterns may face each other, and the ferroelectric pattern may define a first space between the pair of semiconductor patterns. The gate electrode may include a work function metal pattern that is in the first space.
Public/Granted literature
- US20200013870A1 SEMICONDUCTOR DEVICES Public/Granted day:2020-01-09
Information query
IPC分类: