- 专利标题: Modifiable magnet configuration for arc vaporization sources
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申请号: US13148384申请日: 2009-12-30
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公开(公告)号: US11264216B2公开(公告)日: 2022-03-01
- 发明人: Siegfried Krassnitzer , Juerg Hagmann , Oliver Gstoehl
- 申请人: Siegfried Krassnitzer , Juerg Hagmann , Oliver Gstoehl
- 申请人地址: AT Feldkirch; CH Sax; LI Balzers
- 专利权人: Siegfried Krassnitzer,Juerg Hagmann,Oliver Gstoehl
- 当前专利权人: Siegfried Krassnitzer,Juerg Hagmann,Oliver Gstoehl
- 当前专利权人地址: AT Feldkirch; CH Sax; LI Balzers
- 代理机构: Pearne & Gordon LLP
- 优先权: DE102009008161.5 20090209
- 国际申请: PCT/EP2009/009319 WO 20091230
- 国际公布: WO2010/088947 WO 20100812
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H01J37/34 ; C23C14/32
摘要:
The present invention relates to an arc vaporization source for generating hard surface coatings on tools. The invention comprises an arc-vaporization source, comprising at least one electric solenoid and a permanent magnet arrangement that is displaceable relative to the target surface. The vaporization source can be adjusted to the different requirements of oxide, nitride, or metal coatings. The rate drop during the lifespan of a target to be vaporized can be held constant or adjusted by suitably adjusting the distance of the permanent magnets to the front side of the target. A compromise between the coating roughness and rate can be set.
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