- 专利标题: Alert device and alert method thereof
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申请号: US16932399申请日: 2020-07-17
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公开(公告)号: US11263755B2公开(公告)日: 2022-03-01
- 发明人: Shyue-Ru Doong , Feng-Ju Tsai
- 申请人: NANYA TECHNOLOGY CORPORATION
- 申请人地址: TW New Taipei
- 专利权人: NANYA TECHNOLOGY CORPORATION
- 当前专利权人: NANYA TECHNOLOGY CORPORATION
- 当前专利权人地址: TW New Taipei
- 代理机构: Muncy, Geissler, Olds & Lowe, P.C.
- 主分类号: G06K9/00
- IPC分类号: G06K9/00 ; G06T7/13 ; G06T7/00 ; H01L21/67
摘要:
The present disclosure provides an alert device and an alert method. The alert device includes an image capturing unit, an input/output unit and a processing unit. The image capturing unit is configured to capture at least one image of a wafer transportation system. The processing unit is configured to: retrieve the at least one image from the image capturing unit; define a first boundary in the at least one image; identify a wafer chuck of the wafer transportation system in the at least one image; determine whether the wafer chuck intersects the first boundary in the at least one image; and transmit an alert signal to the wafer transportation system via the input/output unit when the wafer chuck is determined to intersect the first boundary in the at least one image.
公开/授权文献
- US20220020157A1 ALERT DEVICE AND ALERT METHOD THEREOF 公开/授权日:2022-01-20
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