- 专利标题: Stress reduction apparatus and method
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申请号: US16568501申请日: 2019-09-12
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公开(公告)号: US11244940B2公开(公告)日: 2022-02-08
- 发明人: Yao-Chun Chuang , Yu-Chen Hsu , Hao Chun Liu , Chita Chuang , Chen-Cheng Kuo , Chen-Shien Chen
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Slater Matsil, LLP
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L25/00 ; H01L21/56 ; H01L23/31 ; H01L25/065
摘要:
A method comprises depositing a protection layer over a first substrate, wherein the first substrate is part of a first semiconductor die, forming an under bump metallization structure over the protection layer, forming a connector over the under bump metallization structure, forming a first dummy plane along a first edge of a top surface of the first semiconductor die and forming a second dummy plane along a second edge of the top surface of the first semiconductor die, wherein the first dummy plane and the second dummy plane form an L-shaped region.
公开/授权文献
- US20200006311A1 Stress Reduction Apparatus and Method 公开/授权日:2020-01-02
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