- 专利标题: FinFET complementary metal-oxide-semiconductor (CMOS) devices
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申请号: US16849279申请日: 2020-04-15
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公开(公告)号: US11244872B2公开(公告)日: 2022-02-08
- 发明人: Tenko Yamashita , Chen Zhang , Teresa Jacqueline Wu
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Tutunjian & Bitetto, P.C.
- 代理商 Robert Sullivan
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238 ; H01L21/28 ; H01L29/66 ; H01L29/06 ; H01L29/49 ; H01L29/78 ; H01L27/092
摘要:
A method of fabricating a complementary metal-oxide-semiconductor device is provided. The method includes forming a work function material layer segment on a gate dielectric layer over a first vertical fin and a bottom spacer layer on an n-type bottom source/drain adjoining the first vertical fin on a first region of a substrate, wherein the gate dielectric layer is also over a second vertical fin, bottom spacer layer on a p-type bottom source/drain adjoining the second vertical fin on a second region. The method further includes heat treating the work function material layer segment to produce a modified work function material layer segment on the first vertical fin with a shifted work function value, forming a second work function material layer on the modified work function material layer segment and the gate dielectric layer on the second vertical fin, and growing a top source/drain on each of the vertical fins.
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