- 专利标题： Electro-optic silicon nitride via electric poling
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申请号： US16655816申请日： 2019-10-17
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公开(公告)号： US11243419B2公开(公告)日： 2022-02-08
- 发明人: Jaime Cardenas , Yi Zhang
- 申请人： University of Rochester
- 申请人地址： US NY Rochester
- 专利权人： University of Rochester
- 当前专利权人： University of Rochester
- 当前专利权人地址： US NY Rochester
- 代理机构： Harris Beach PLLC
- 主分类号： G02F1/035
- IPC分类号： G02F1/035 ; H01L21/02 ; C23C16/34 ; C23C16/50
摘要：
A deposition method for manufacturing an active electro-optic layer includes providing a substrate or a base layer; and applying an electric field across a silicon nitride layer as it is being deposited on the substrate or the base layer to cause a poling of a deposited layer. Alternative methods for poling an active electro-optic layer and an electro-optical device are also described.
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