Invention Grant
- Patent Title: High speed handling of ultra-small chips by selective laser bonding and debonding
-
Application No.: US16658675Application Date: 2019-10-21
-
Publication No.: US11222862B2Publication Date: 2022-01-11
- Inventor: Qianwen Chen , Bing Dang , Russell Budd , Bo Wen , Li-Wen Hung , Jae-Woong Nah , John Knickerbocker
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael J. Chang, LLC
- Agent Daniel Morris
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/683 ; H01L25/00

Abstract:
Techniques for high speed handling of ultra-small chips (e.g., micro-chips) by selective laser bonding and/or debonding are provided. In one aspect, a method includes: providing a first wafer including chips bonded to a surface thereof; contacting the first wafer with a second wafer, the second wafer including a substrate bonded to a surface thereof, wherein the contacting aligns individual chips with bonding sites on the substrate; and debonding the individual chips from the first wafer using a debonding laser having a small spot size of about 0.5 μm to about 100 μm, and ranges therebetween. A system is also provided that has digital cameras, a motorized XYZ-axis stage, and a computer control system configured to i) control a spot size of the at least one laser source and ii) adjust a positioning of the sample to align individual chips with a target area of the laser.
Public/Granted literature
- US20200051948A1 High Speed Handling of Ultra-Small Chips by Selective Laser Bonding and Debonding Public/Granted day:2020-02-13
Information query
IPC分类: