- 专利标题: In-line wet bench device and method for the wet-chemical treatment of semiconductor wafers
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申请号: US15536614申请日: 2015-12-09
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公开(公告)号: US11183408B2公开(公告)日: 2021-11-23
- 发明人: Anika Weihrauch
- 申请人: HANWHA Q CELLS GMBH
- 申请人地址: DE Bitterfeld-Wolfen
- 专利权人: HANWHA Q CELLS GMBH
- 当前专利权人: HANWHA Q CELLS GMBH
- 当前专利权人地址: DE Bitterfeld-Wolfen
- 代理机构: Christensen, Fonder, Dardi & Herbert PLLC
- 优先权: DE102014119090.4 20141218
- 国际申请: PCT/DE2015/100528 WO 20151209
- 国际公布: WO2016/095900 WO 20160623
- 主分类号: H01L21/677
- IPC分类号: H01L21/677 ; H01L21/67 ; H01L21/02
摘要:
An in-line wet bench device for the wet-chemical treatment of semiconductor wafers, comprising a plurality of conveying rollers, each of which is rotatable about an axis of rotation, for the in-line transport of semiconductor wafers along a conveying direction, wherein the axes of rotation are arranged parallel to one another and perpendicular to the conveying direction, the conveying rollers having a cylindrical conveying section which extends axially along the respective axis of rotation and forms a conveying surface in the shape of a cylindrical sleeve. The conveying surface has at least one smooth region with surface roughnesses of less than 10 μm when viewed in the axial direction and rough regions with surface roughnesses of more than 100 μm axially adjacent to the smooth region.
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