- 专利标题: Temperature control for insertable target holder for solid dopant materials
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申请号: US16735125申请日: 2020-01-06
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公开(公告)号: US11170973B2公开(公告)日: 2021-11-09
- 发明人: Shreyansh P. Patel , Graham Wright , Daniel Alvarado , Daniel R. Tieger , Brian S. Gori , William R. Bogiages, Jr. , Benjamin Oswald , Craig R. Chaney
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Nields, Lemack & Frame, LLC
- 主分类号: H01J37/302
- IPC分类号: H01J37/302 ; H01J37/08 ; H01J37/317
摘要:
An ion source with a target holder for holding a solid dopant material is disclosed. The ion source comprises a thermocouple disposed proximate the target holder to monitor the temperature of the solid dopant material. In certain embodiments, a controller uses this temperature information to vary one or more parameters of the ion source, such as arc voltage, cathode bias voltage, extracted beam current, or the position of the target holder within the arc chamber. Various embodiments showing the connections between the controller and the thermocouple are shown. Further, embodiments showing various placement of the thermocouple on the target holder are also presented.
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