- 专利标题: Packaging method and packaging structure
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申请号: US16702800申请日: 2019-12-04
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公开(公告)号: US11130673B2公开(公告)日: 2021-09-28
- 发明人: Tianlun Yang
- 申请人: Ningbo Semiconductor International Corporation
- 申请人地址: CN Ningbo
- 专利权人: Ningbo Semiconductor International Corporation
- 当前专利权人: Ningbo Semiconductor International Corporation
- 当前专利权人地址: CN Ningbo
- 代理机构: Anova Law Group, PLLC
- 优先权: CN201811595035.9 20181225
- 主分类号: B81C1/00
- IPC分类号: B81C1/00 ; B81B7/02
摘要:
A packaging method and a packaging structure are provided. The packaging method includes providing a cap wafer including a groove; forming a sacrificial layer in the groove and a first device on the sacrificial layer; providing a substrate wafer and a second device formed on the substrate wafer; bonding a surface of the cap wafer having the first device formed thereon with a surface of the substrate wafer having the second device formed thereon, to form an electrical connection between the first device and the second device; and removing the sacrificial layer from a side of the cap wafer away from the substrate wafer, to form a cavity. The first device is located in the cavity.
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