- 专利标题: Resist composition and method of forming resist pattern
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申请号: US16225332申请日: 2018-12-19
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公开(公告)号: US11067888B2公开(公告)日: 2021-07-20
- 发明人: Takashi Nagamine , Emi Uchida , Tsuyoshi Nakamura
- 申请人: TOKYO OHKA KOGYO CO., LTD.
- 申请人地址: JP Kawasaki
- 专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人地址: JP Kawasaki
- 代理机构: Knobbe Martens Olson & Bear LLP
- 优先权: JPJP2017-250060 20171226
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/039 ; G03F7/30 ; G03F7/38 ; C08L33/14 ; C09D133/06 ; G03F7/20
摘要:
A resist composition containing a polymer compound which has a constitutional unit (a0) represented by Formula (a0-1); and an acid generator which is formed of a compound represented by Formula (b1) (in the formulae, Ra00 represents an acid dissociable group represented by Formula (a0-r1-1); Ra01, Ra02, Ra031, Ra032, and Ra033 represent a hydrocarbon group; Ya0 represents a quaternary carbon atom; Rb1 represents a hydrocarbon group which has a steroid skeleton containing at least one hydroxyl group; Yb1 represents a divalent linking group having a single bond or a hetero atom; Vb1 represents a single bond, an alkylene group, or a fluorinated alkylene group; and Rf1 represents a hydrogen atom, a fluorine atom, or a fluorinated alkyl group).
公开/授权文献
- US20190196329A1 RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN 公开/授权日:2019-06-27
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