- 专利标题： Measurement of thickness of thermal barrier coatings using 3D imaging and surface subtraction methods for objects with complex geometries
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申请号： US16268446申请日： 2019-02-05
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公开(公告)号： US11009339B2公开(公告)日： 2021-05-18
- 发明人: Kamala Chakravarthy Raghavan , David Alexander Britz
- 申请人： Applied Materials, Inc.
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson + Sheridan LLP
- 主分类号： G01B11/06
- IPC分类号： G01B11/06 ; G06K7/14 ; G01B11/25
摘要：
Embodiments described herein relate to a non-destructive measurement device measurement device and a non-destructive measurement method for determining coating thickness of a three-dimensional (3D) object. In one embodiment, at least one first 3D image of an uncoated surface of the object and at least one second 3D image of a coated surface of the object are collected and analyzed to the determine the coating thickness of the object.
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