Invention Grant
- Patent Title: Target image capturing device and extreme ultraviolet light generation device
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Application No.: US16389867Application Date: 2019-04-19
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Publication No.: US10976664B2Publication Date: 2021-04-13
- Inventor: Hirokazu Hosoda
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H04N5/225 ; H05G2/00

Abstract:
A target image capturing device according to an aspect of the present disclosure includes: a delay circuit configured to receive a timing signal from outside and output a first trigger signal at a timing delayed by a first delay time from the reception of the timing signal; an illumination light source configured to emit light based on the first trigger signal; an image capturing unit disposed to capture an image of a shadow of a target to be observed, which is generated when the target is irradiated with the light emitted from the illumination light source; a processing unit configured to perform image processing including processing of measuring a background luminance from the image captured by the image capturing unit; and a control unit configured to perform control to adjust the first delay time based on the background luminance.
Public/Granted literature
- US20190250517A1 TARGET IMAGE CAPTURING DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE Public/Granted day:2019-08-15
Information query
IPC分类: