Invention Grant
- Patent Title: Method and systems for coupling semiconductor substrates
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Application No.: US15287636Application Date: 2016-10-06
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Publication No.: US10971540B2Publication Date: 2021-04-06
- Inventor: Richard E. Bornfreund , Joseph H. Durham
- Applicant: FLIR Systems, Inc.
- Applicant Address: US OR Wilsonville
- Assignee: FLIR Systems, Inc.
- Current Assignee: FLIR Systems, Inc.
- Current Assignee Address: US OR Wilsonville
- Agency: Haynes and Boone, LLP
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L21/027 ; H01L21/3213 ; H01L23/00 ; H01L23/544

Abstract:
Systems and methods may be provided for coupling together semiconductor devices. One or more of the semiconductor devices may be provided with an array of bump contacts formed in an etch back process. The bump contacts may be indium bumps. The indium bumps may be formed by depositing a sheet of indium onto a surface of a device substrate, depositing and patterning a layer of photoresist over the indium layer, and selectively etching the indium layer to the surface of the substrate using the patterned photoresist layer to form the indium bumps. The substrate may be an infrared detector substrate. The infrared detector substrate may be coupled to a readout integrated circuit substrate using the bumps.
Public/Granted literature
- US20170025453A1 METHOD AND SYSTEMS FOR COUPLING SEMICONDUCTOR SUBSTRATES Public/Granted day:2017-01-26
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