Invention Grant
- Patent Title: Manufacturing method for a TFT array substrate and TFT array substrate
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Application No.: US16097279Application Date: 2018-09-18
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Publication No.: US10971530B2Publication Date: 2021-04-06
- Inventor: Guanghui Liu , Peng He , Yong Xu , Fei Ai
- Applicant: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Wuhan
- Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Current Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Wuhan
- Agent Leong C. Lei
- Priority: CN201810362822.2 20180420
- International Application: PCT/CN2018/106327 WO 20180918
- International Announcement: WO2019/200834 WO 20191024
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
A manufacturing method for TFT array substrate and TFT array substrate are disclosed. After depositing an electrode material layer and a metal material layer on the gate insulation layer and the active layer in sequence after the active layer above the gate electrode is formed. A photoresist pattern is formed on the metal material layer. The photoresist pattern includes a first and second photoresist blocks with different thicknesses. The metal material layer and the electrode material layer are etched using the photoresist pattern to form a contact electrode and pixel electrodes connected with two ends of the active layer and the source/drain electrodes on the contact electrode. The process is simple and can effectively reduce the contact resistance between the source/drain and the active layer and improve the quality of the product.
Public/Granted literature
- US20190326335A1 MANUFACTURING METHOD FOR A TFT ARRAY SUBSTRATE AND TFT ARRAY SUBSTRATE Public/Granted day:2019-10-24
Information query
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