Invention Grant
- Patent Title: Image sensor device and method of forming the same
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Application No.: US15809458Application Date: 2017-11-10
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Publication No.: US10943942B2Publication Date: 2021-03-09
- Inventor: Chia-Yu Wei , Yen-Liang Lin , Kuo-Cheng Lee , Hsun-Ying Huang , Hsin-Chi Chen
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L31/103 ; H01L31/0352 ; H01L31/0336 ; H01L31/028 ; H01L31/0312 ; H01L31/0304 ; H01L31/0296

Abstract:
An image sensor device includes a semiconductor substrate, a radiation sensing member, a device layer and a trench isolation. The semiconductor substrate has a front side surface and a back side surface opposite to the front side surface. The radiation sensing member is disposed in a photosensitive region of the semiconductor substrate and extends from the front side surface of the semiconductor substrate. The radiation sensing member includes a semiconductor material with an optical band gap energy smaller than 1.77 eV. The device layer is over the front side surface of the semiconductor substrate and the radiation sensing member. The trench isolation is disposed in an isolation region of the semiconductor substrate and extends from the back side surface of the semiconductor substrate.
Public/Granted literature
- US20190148450A1 IMAGE SENSOR DEVICE AND METHOD OF FORMING THE SAME Public/Granted day:2019-05-16
Information query
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