- 专利标题: Gas distributor and flow verifier
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申请号: US16040326申请日: 2018-07-19
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公开(公告)号: US10943769B2公开(公告)日: 2021-03-09
- 发明人: Mark Taskar , Iqbal A. Shareef
- 申请人: Lam Research Corporation
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: Schwegman Lundberg & Woessner, P.A.
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; F16K11/10
摘要:
Apparatus and methods for distributing and mixing gas are provided. In one example, a gas distributor comprises a body, a gas inlet for admitting gas to the body, an orbital array of gas outlets for distributing the gas to an external component, and a central gas distribution point disposed within the body at a center of the orbital array of gas outlets and in fluid communication with the orbital array of gas outlets.
公开/授权文献
- US20200027702A1 GAS DISTRIBUTOR AND FLOW VERIFIER 公开/授权日:2020-01-23
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