- 专利标题: Freeform distortion correction
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申请号: US15595497申请日: 2017-05-15
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公开(公告)号: US10935892B2公开(公告)日: 2021-03-02
- 发明人: Tamer Coskun , Thomas L. Laidig , Jang Fung Chen
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson + Sheridan LLP
- 主分类号: G03F7/20
- IPC分类号: G03F7/20
摘要:
Methods and systems are provided that, in some embodiments, print and process a layer. The layer can be on a wafer or on an application panel. Thereafter, locations of the features that were actually printed and processed are measured. Based upon differences between the measured differences and designed locations for those features at least one distortion model is created. Each distortion model is inverted to create a corresponding correction model. When there are multiple sections, a distortion model and a correction model can be created for each section. Multiple correction models can be combined to create a global correction model.
公开/授权文献
- US20180329310A1 FREEFORM DISTORTION CORRECTION 公开/授权日:2018-11-15
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