- 专利标题: Slip-plane MEMS probe for high-density and fine pitch interconnects
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申请号: US16145571申请日: 2018-09-28
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公开(公告)号: US10935573B2公开(公告)日: 2021-03-02
- 发明人: Joe Walczyk , Pooya Tadayon
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Green, Howard & Mughal LLP.
- 主分类号: G01R1/06
- IPC分类号: G01R1/06 ; G01R1/067 ; G01R3/00 ; B81B7/02 ; H01L23/00 ; G01R31/26
摘要:
A device probe includes a primary probe arm and a subsequent probe arm with a slip plane spacing between the primary probe arm and subsequent probe arm. Each probe arm is integrally part of a probe base that is attachable to a probe card. During probe use on a semiconductive device or a semiconductor device package substrate, overtravel of the probe tip allows the primary and subsequent probe arms to deflect, while sufficient resistance to deflection creates a useful contact with an electrical structure such as an electrical bump or a bond pad.
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