- 专利标题： Rare-earth oxide based chamber material
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申请号： US16405783申请日： 2019-05-07
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公开(公告)号： US10934216B2公开(公告)日： 2021-03-02
- 发明人: Jennifer Y. Sun , Biraja P. Kanungo
- 申请人： Applied Materials, Inc.
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Lowenstein Sandler LLP
- 主分类号： C04B35/50
- IPC分类号： C04B35/50 ; C04B35/505 ; C23C14/08 ; C04B35/626 ; C04B37/00 ; C04B37/02 ; H01L21/687 ; C23C16/44 ; H01J37/32 ; C23C4/11 ; C23C4/134 ; C04B35/622 ; C23C16/40 ; H01L21/67 ; H01L21/683 ; C23C16/455 ; C23C16/50 ; C23C14/22
摘要：
An article comprises a plasma resistant ceramic material comprising Y2O3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at a concentration of above 30 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at a concentration of over 0 molar % to approximately 30 molar %.
公开/授权文献
- US20190263722A1 RARE-EARTH OXIDE BASED CHAMBER MATERIAL 公开/授权日：2019-08-29
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