- 专利标题: Advanced interconnects containing an IMT liner
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申请号: US16585672申请日: 2019-09-27
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公开(公告)号: US10930589B2公开(公告)日: 2021-02-23
- 发明人: Joseph F. Maniscalco , Andrew Tae Kim , Baozhen Li , Chih-Chao Yang
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 L. Jeffrey Kelly, Esq.
- 主分类号: H01L23/525
- IPC分类号: H01L23/525 ; H01L23/532 ; H01L21/768
摘要:
An interconnect structure is provided that includes a liner located between an electrically conductive structure and an interconnect dielectric material layer. The liner is composed of a phase change material that is insulating at a first temperature, and becomes conductive at a second temperature that is higher than the first temperature. The liner that is composed of such a phase change material is referred to as an “insulator-to/from metal transition (IMT)” liner. In the present application, an entirety of, or a portion of, the IMT liner may be changed from an insulating phase to a conductive phase by increasing the temperature (i.e., heating) of the liner so as to provide a redundancy path in which electrons can flow.
公开/授权文献
- US20200027829A1 ADVANCED INTERCONNECTS CONTAINING AN IMT LINER 公开/授权日:2020-01-23
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