- 专利标题: Integrated structures having gallium-containing regions
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申请号: US16589985申请日: 2019-10-01
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公开(公告)号: US10910476B2公开(公告)日: 2021-02-02
- 发明人: Chris M. Carlson
- 申请人: Micron Technology, Inc.
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Wells St. John P.S.
- 主分类号: H01L21/28
- IPC分类号: H01L21/28
摘要:
Some embodiments include an integrated structure having a gallium-containing material between a charge-storage region and a semiconductor-containing channel region. Some embodiments include an integrated structure having a charge-storage region under a conductive gate, a tunneling region under the charge-storage region, and a semiconductor-containing channel region under the tunneling region. The tunneling region includes at least one dielectric material directly adjacent a gallium-containing material. Some embodiments include an integrated structure having a charge-trapping region under a conductive gate, a first oxide under the charge-storage region, a gallium-containing material under the first oxide, a second oxide under the gallium-containing material, and a semiconductor-containing channel region under the second oxide.
公开/授权文献
- US20200035795A1 Integrated Structures Having Gallium-Containing Regions 公开/授权日:2020-01-30
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