- 专利标题： Standby port and substrate processing apparatus having the same
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申请号： US16224891申请日： 2018-12-19
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公开(公告)号： US10825699B2公开(公告)日： 2020-11-03
- 发明人: Buyoung Jung , Jonghan Kim , Young Jin Jang , Jin Tack Yu , Youngjun Choi , Daehun Kim , Byungsun Bang , Jonghyeon Woo , Heehwan Kim , Cheol-Yong Shin , Gui Su Park
- 申请人： SEMES CO., LTD.
- 申请人地址： KR Chungcheongnam-Do
- 专利权人： SEMES CO., LTD.
- 当前专利权人： SEMES CO., LTD.
- 当前专利权人地址： KR Chungcheongnam-Do
- 代理机构： Li & Cai Intellectual Property (USA) Office
- 优先权： com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@40607fc6
- 主分类号： H01L21/67
- IPC分类号： H01L21/67 ; H01L21/683
摘要：
Disclosed are a standby port and a substrate processing apparatus having the same. The standby port exhausts fumes generated when a processing liquid is discharged into the standby port before the supply of the processing liquid onto a substrate, thereby preventing pollution of a chamber atmosphere.
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